EECS Clean Room Annealing Angstrom Engineering Glove Box JetFirst-100 Forming JetFirst-150 RTP S1T1 – Annealing 4″ & 6″ S6T1 – Annealing (non-CMOS) Diffusion/Doping S5T1 – Phosphorous Diffusion 4″ only S5T2 – Phosphorous Anneal/Oxidation 4″ only S5T3 – Boron Diffusion 4″ only S5T4 – Boron Anneal/Oxidation 4″ only Lithography ACS 200 cluster tool CEE 100CB Spinner CEE 200X PR Spinner #1 CEE 200X PR Spinner #2 CEE Developer #1 CEE Developer #2 Deep UV SenLights PL16 GCA AS200 AutoStep Heidelberg Mask Maker Image Reversal Oven JEOL E-Beam MA/BA-6 Mask/Bond Aligner MA6 Mask Aligner MJB3-#2 Spinner CEE Apogee LPCVD S1T2 – LTO 4″ (No Metals) S1T3 – N-Type in Situ Doped Poly-Si 6″ S1T4 – LTO 6″ (No Metals) S2T2 – Nitride/HTO 6″ S2T3 – Nitride/HTO 4″ S2T4 – Low Stress Nitride 4″ and 6″ S3T3 – Flat Poly-Si 4″ S3T4 – N-Type in Situ Doped Poly-Si 4″ S4T2 – PSG 4″ S4T3 – P-Type in Situ Doped Poly-Si 4″ S4T4 – TEOS 4″ S6T2 – Nitride/HTO/OxyNitride S6T3 – Non CMOS Clean Poly 4″ S6T4 – Non CMOS Clean LTO Metrology Dektak XT Surface Profilometer EDS Flexus 2320-S ICON AFM IR Microscope NanoSpec 6100 Probe Station Everbeing BD-6 SEM In-line Woollam M-2000 Ellipsometer Zygo NewView 5000 Oxidation S2T1 – Storage S3T1 – Dry Oxidation 4″ and 6″ S3T2 – Wet Oxidation 4″ and 6″ PECVD GSI PECVD Oxford ALD P5000 PECVD Veeco Fiji ALD Plasma Etch LAM 9400 Nanoquest II Ion Mill Oxford ICP RIE P5000 RIE Plasmatherm 790 Sample Mounting Station STS Glass Etcher STS Pegasus 4 STS Pegasus 6 Xactix XeF2 YES Plasma Stripper Plating Gold Plating Station PVD AE Evaporator Cooke Evaporator Endeavor M1 AlN Sputter EnerJet Evaporator Lab18_01 Lab18_02 Old Evap Placeholder – do not use PDS 2035 PVD75 SJ-20 Evaporator Release Tousimis Automegasamdri 915B (CPD)-1 Wafer Bonding CL200 Megasonic Cleaner EVG 510 EVG 520IS EVG620 Bond Aligner nP12 nanoPREP SB-6E Bonder Wafer Clean PSC 122M Mask Cleaner Wet Benches Acid Bench 02, 1480C Acid Bench 12,1480B Acid Bench 73, 1440B Acid Bench 80, 1440A Base Bench 63, 1440C E-Beam Solvent Bench 22, 1480A E-Beam Spinner/Hot-Plate Bench 21, 1480A Mask Bench 13, 1480B PFC Bench 01, 1480C RCA Clean Bench 81, 1440A Solvent Bench 14, 1480B Solvent Bench 83, 1440A Solvent Bench 84, 1440A ROBIN Annealing Convection Oven Furnace Sentro-Tech ST-1800C-888 YES Vacuum Oven Bio BSL-2 Room Lithography Dimatix InkJet MJB 45S NanoInk DPN 5000 Metrology Agilent uFTIR Dektak 6M Surface Profilometer NanoSpec 6100 Olympus BX-51 Microscope Olympus LEXT Interferometer Rame-Hart Goniometer Packaging ADT 7100 Dicing Saw Ball Bonder MPP iBond5000 Flip Chip Bonder Wedge Bonder MPP iBond5000 Polishing CMP Strasbaugh 6EC Lapper Wafer Clean Glen 1000P Plasma Cleaner SSEC Wafer Cleaner Wet Benches Acid Bench 92, 1436D Base Bench 91, 1436C EDP Bench 93, 1436D Solvent Bench 94, 1436F
