Biological Microsystems and Biomaterials Capabilities

The LNF offers microfabrication tools and materials for biological research including soft lithography and a dedicated space with Bio-Safety Level 2 (BSL 2) certification.

TechnologyLNF instruments and capabilities
Soft lithography suite– PDMS mixing and curing station
– CVD chamber for deposition of PDMS mold release agent
– SU8 lithography
– Glen 1000P plasma chamber for PDMS bond activation

For more information:
https://lnf-wiki.eecs.umich.edu/wiki/Soft_lithography
Bio-Safety Level 2 spaceUV light, Waste handling, Bio safety cabinet, CO2 incubator, Mixer, centrifuge, Substrate cleaning (piranha, plasma, CO2 snow), Biofreezer

For more information:
https://lnf-wiki.eecs.umich.edu/wiki/BSL_2_Bio-Room